"Chemical Vapor Deposition Synthesis of Tantalum Carbide-Graphite Composite Films"

Table 1 Surface roughness of TAc-graphite composite films synthesized under different process parameters

Figure 1 3D AFM images on 2 × 2 μm area of TAc-graphite composite films of samples 1, 2, 3, 4 and 5 [at (a) 25 Torr, (b) 60 Torr, (c) 100 Torr, (d) 950°C and (e) deposition at 6 vol% CH4]

Figure 2. SEM fracture cross-sections showing the TAc-graphite composite film thickness of samples 1, 2, 3, 4 and 5 [deposited at (a) 25 Torr, (b) 60 Torr, (c) 100 Torr, (d) 950 Torr

Figure 3 XRD patterns of TAc-graphite composite films of samples 1, 2, 3, 4 and 5 [deposited at (a) 25 Torr, (b) 60 Torr, (c) 100 Torr, (d) 950 °C and (e) ) under 6 vol% CH4]